Il Nuovo Cimento C

Year 2006 - Issue 3 - May-June

Perspectives and advantages of the use of excimer laser annealing for MOS technology

Authors: V. Privitera, P. Alippi, M. Camalleri, M. Cuscunà, G. Fortunato, A. La Magna, G. La Rosa, A. Magr`ı, L. Mariucci, E. Monakhov, D. Salinas, F. Simon, C. Spinella, B. G. Svensson
DOI: 10.1393/ncc/i2006-10006-2
pp. 369-379
Published online 21 June 2006
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